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Bobst Group SA Roll-To-Roll Sputtering

Roll-to-roll Sputtering System GVE/Optilab: Roll-to-roll equipment for the deposition of ultra-thin films (in the nanometer range). The system can deposit various materials (metals, transparent conductive layers) onto film substrates. It is equipped with multiple sputtering cathodes, enabling simultaneous deposition of several thin layers.

GVE, Bobst Ltd, Optilab, 2010, Vacuum roll-to-roll sputtering tool with three deposition chambers, each accommodating two cathodes; complete with:
- 520 mm web width, bi-directional winding with interleave and de-interleave functionality
- Turbo-molecular pumps (magnetic levitation) in all zones
- Drum chiller, reheat unit (-20°C to +200°C)
- 1100 Polycold unit with cryo coils in each sputtering and winding zone
- GVE AC medium frequency plasma unit
- Post-coating resistance monitoring system (measuring resistance on the web centerline)
- Siemens WIN CC touchscreen system for machine and monitoring control
- Infrared heating zone (three heating units)
- Web biasing system (including PSU, etc.)
Rcodpowi Sp Aofx Aa Doh
- 1 General Magnetron including 2 x 20 kW pulsed DC power supplies
- 1 Dual Magnetron including 2 x 10 kW pulsed DC power supplies (with concealed anode)
- Mass Flow Controllers (MFCs), etc.
- 1 fully integrated PEM sputter control system

Original purchase price: EUR 1,450,000.

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