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ULVAC Model LR600

Here we offer a ULVAC dry vacuum pump.

ULVAC Dry Vacuum Pump
Solution for harsh process pumping
Dry vacuum pump
ULVAC’s unique approach to utilizing latent heat within the pump body enables the LR / HR / UR series to perform even under the most demanding processes.
ULVAC has focused its design efforts on maintaining an extremely uniform high temperature across all pump stages and has optimized this pump family for CVD and etching applications.
Compatible with ULVAC’s ECO-SHOCK system for additional energy savings.

Features
The LR series pump is designed for load lock chambers and PVD processes.
ULVAC’s unique aluminum design enables a very uniform temperature distribution throughout the pump body.
The ULVAC LR series pump is designed for applications requiring a heated pump, heated gas lines, and/or heated exhaust lines.
Excellent helium pumping capability.
Hermetically sealed motor for safety and ease of maintenance.
Withstands power interruptions of up to 500 ms.
Internal components are specially treated to ensure a high level of surface hardness and excellent corrosion resistance.
This prevents wear of internal pump components when exposed to corrosive gases.
(LR series)
Designed for process gases that produce powdery by-products, such as Si crystal growth furnaces.
Forepump for turbomolecular and mechanical booster pumps.
Type: LR600
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Condition: new
Scope of delivery: (See picture)
(Technical data subject to change and errors excepted!)
If you have further questions, we are happy to answer them by phone.

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